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Control and mass selection of C[sub n]H[sub m][sup +] fragments in an inductively coupled pulsed plasma

✍ Scribed by Zeze, D. A.; Joyce, A. M.; Anderson, C. A.; Brown, N. M. D.


Book ID
120198476
Publisher
American Institute of Physics
Year
2002
Tongue
English
Weight
345 KB
Volume
80
Category
Article
ISSN
0003-6951

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Investigation of the uniformity and cove
✍ Zeze, D. A.; North, D. R.; Brown, N. M. D.; Anderson, C. A. πŸ“‚ Article πŸ“… 2000 πŸ› John Wiley and Sons 🌐 English βš– 340 KB

The films were grown using an inductively coupled plasma with two different precursor gas mixtures: CH 4 /N 2 and C 10 H 16 /N 2 . The lateral compositional uniformity of the specimens and the resultant substrate coverage are investigated here using XPS, AES, Raman spectroscopy and SEM. X-ray photo