## Abstract Selective area growth (SAG) based on plasma assisted molecular beam epitaxy (PAMBE) was demonstrated to be effective to achieve low contact resistance for nonalloyed ohmic metals. An AlGaN/GaN highโelectron mobility transistor (HEMT) using SAG by PAMBE with nonalloyed ohmic metals and r
Growth optimisation of the GaN layers and GaN/AlGaN heterojunctions on bulk GaN substrates using plasma-assisted molecular beam epitaxy
โ Scribed by Skierbiszewski, C. ;Wasilewski, Z. ;Siekacz, M. ;Feduniewicz, A. ;Pastuszka, B. ;Grzegory, I. ;Leszczynski, M. ;Porowski, S.
- Publisher
- John Wiley and Sons
- Year
- 2004
- Tongue
- English
- Weight
- 176 KB
- Volume
- 201
- Category
- Article
- ISSN
- 0031-8965
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
InGaN/GaN multiple quantum-wells (MQWs) on Ga-polarity GaN by plasma-assisted molecularbeam epitaxy were grown and characterized. In-situ reflection high-energy-electron diffraction observations and high-resolution X-ray diffraction results indicated that a flat interface and a good periodicity of t
## Abstract For the first time, selectiveโarea growth (SAG) technique has been developed using plasmaโassisted molecular beam epitaxy (PAMBE), enabling fabrication of a recessedโgate structure for the metalโsemiconductor fieldโeffect transistor (MESFET) without etching. On patterned SiO~2~ samples,
a), T. Tanabe (a), S. Kubo (a), S. Kurai (a), T. Taguchi (a), K. Kainosho (b), and A. Yokohata (b)