Growth of TiC films by Pulsed Laser Evaporation (PLE) and characterization by XPS and AES
β Scribed by O. Rist; P. T. Murray
- Book ID
- 112291050
- Publisher
- Springer
- Year
- 1991
- Tongue
- English
- Weight
- 423 KB
- Volume
- 341
- Category
- Article
- ISSN
- 1618-2650
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Thin titanium hydride (TiH y ) films, covered by ultrathin gold layers, have been compared with the corresponding titanium films after analysis using a combination of time-of-flight SIMS (ToF-SIMS), XPS and AES. The TiH y layers were prepared under UHV conditions by precisely controlled hydrogen sor