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Growth of polycrystalline silicon films on glass by high-temperature chemical vapour deposition

✍ Scribed by Bergmann, R B; Brendel, R; Wolf, M; Lölgen, P; Krinke, J; Strunk, H P; Werner, J H

Book ID: 121431852
Publisher: Institute of Physics
Year: 1997
Tongue: English
Weight: 233 KB
Volume: 12
Category: Article
ISSN: 0268-1242
DOI: 10.1088/0268-1242/12/2/012

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