Determination of the Thickness of Chemic
β
K. Somogyi; M. NΓ©meth-Sallay; Γ. Nemcsics
π
Article
π
1991
π
John Wiley and Sons
π
English
β 379 KB
π 1 views
Thinning of epitaxial GaAs layers was studied during the surface etching, with a special attention to submicron epitaxial structures, like MESFET or varactor-type structures. Each chemical treatment influences the crystal surface dunng the device preparation processes, though the possible thinning o