Growth of high resistivity GaAs VPE layers for device applications by the AsCl3-Ga-N2 system

✍ Scribed by J. Komeno; K. Kitahara; S. Ohkawa

• Publisher: Elsevier Science
• Year: 1979
• Tongue: English
• Weight: 212 KB
• Volume: 47
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(79)90147-7