✦ LIBER ✦
A multi-wafer growth technique for GaAs vapor phase epitaxy using the AsCl3-Ga-N2 system with a horizontal reactor
✍ Scribed by J. Komeno; A. Miura; S. Ohkawa
- Publisher
- Elsevier Science
- Year
- 1978
- Tongue
- English
- Weight
- 382 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0022-0248
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