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Growth of Epitaxial 3C-SiC Films on Si(100) via Low Temperature SiC Buffer Layer

✍ Scribed by Lien, Wei-Cheng; Ferralis, Nicola; Carraro, Carlo; Maboudian, Roya

Book ID: 120373820
Publisher: American Chemical Society
Year: 2010
Tongue: English
Weight: 802 KB
Volume: 10
Category: Article
ISSN: 1528-7483
DOI: 10.1021/cg901189k

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