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Growth of cBN films by d.c.-bias assisted inductively-coupled r.f. plasma chemical vapor deposition

✍ Scribed by Yu, J; Matsumoto, S

Book ID: 122637058
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 499 KB
Volume: 12
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2003.08.006

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