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Growth kinetics of plasma deposited microcrystalline silicon thin films

✍ Scribed by E. Amanatides; D. Mataras

Book ID: 113919363
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 474 KB
Volume: 205
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2010.12.026

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