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Contribution of plasma generated nanocrystals to the growth of microcrystalline silicon thin films

โœ Scribed by S. Kasouit; J. Damon-Lacoste; R. Vanderhaghen; P. Roca i Cabarrocas


Book ID
116667673
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
331 KB
Volume
338-340
Category
Article
ISSN
0022-3093

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