𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Determination factor of direction growth in microcrystalline silicon thin film deposition

✍ Scribed by Kimihiko Saito; Michio Kondo

Book ID
119301131
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
543 KB
Volume
358
Category
Article
ISSN
0022-3093

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Investigation of crystalline orientation
Investigation of crystalline orientation factor in microcrystalline silicon thin film deposition
✍ Saito, Kimihiko ;Kondo, Michio πŸ“‚ Article πŸ“… 2010 πŸ› John Wiley and Sons 🌐 English βš– 502 KB

## Abstract Crystalline orientation factors in microcrystalline silicon (Β΅c‐Si) deposition are investigated by the triode‐plasma enhanced chemical vapor deposition (PECVD) method and conventional diode‐PECVD with optical emission spectroscopy (OES). The existence of more important factors for the o