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Growth kinetics and oxidation behavior of WSi2 coating formed by chemical vapor deposition of Si on W substrate

✍ Scribed by Jin-Kook Yoon; Kyung-Whan Lee; Sung-Jae Chung; In-Jin Shon; Jung-Mann Doh; Gyeung-Ho Kim

Book ID: 116600050
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 605 KB
Volume: 420
Category: Article
ISSN: 0925-8388
DOI: 10.1016/j.jallcom.2005.11.002

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