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Growth and characterization of SiC micro-crystals on Si(100) substrate by the chemical vapor deposition method

✍ Scribed by Mo, Y.H.; Shajahan, Md.; Lee, K.S.; Kim, K.C.; Cha, O.H.; Suh, E.-K.; Nahm, K.S.


Book ID
122488382
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
665 KB
Volume
11
Category
Article
ISSN
0925-9635

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