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Growth and characterization of diamond films on TiN/Si(100) by microwave plasma chemical vapor deposition

โœ Scribed by Chen, Wei-Chun; Wang, Wei-Lin; Tiwari, Rajanish N.; Chang, Li


Book ID
121400978
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
708 KB
Volume
18
Category
Article
ISSN
0925-9635

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