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Growth Behavior of m-Plane ZnO Epilayer on (100) LiGaO2 by Chemical Vapor Deposition

✍ Scribed by Yu, Jun-Yi; Huang, Teng-Hsing; Chang, Liuwen; Liao, Yen-Hsiang; Chou, Mitch M. C.; Gan, Dershin

Book ID
121863037
Publisher
The Electrochemical Society
Year
2011
Tongue
English
Weight
389 KB
Volume
158
Category
Article
ISSN
0013-4651

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## Abstract Low lattice‐mismatched γ‐LiAlO~2~(100) substrates were employed to grow ZnO epitaxial films by chemical vapor deposition. The influence of growth temperature on growth behavior of ZnO was investigated. Results indicated that the low lattice‐matched (10$ \bar 1 $0) crystallites nucleate