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Growth and properties of hydrogen-free DLC films deposited by surface-wave-sustained plasma

✍ Scribed by Xu, Junqi; Fan, Huiqing; Kousaka, Hiroyuki; Umehara, Noritsugu; Diao, Dongfeng; Liu, Weiguo


Book ID
120369753
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
276 KB
Volume
16
Category
Article
ISSN
0925-9635

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