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Structure and adhesive properties of TiN films reactively deposited by plasma-free sputtering

โœ Scribed by Takakazu Takahashi; Katsumi Masugata; Satoshi Iwatsubo; Mineo Asada


Book ID
114086726
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
357 KB
Volume
343-344
Category
Article
ISSN
0040-6090

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