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Growth and characterization of TiO2nanotubes from sputtered Ti film on Si substrate

✍ Scribed by Karumbaiah N Chappanda, York R Smith, Swomitra K Mohanty, Loren W Rieth, Prashant Tathireddy, Mano Misra

Book ID
119906018
Publisher
Springer-Verlag
Year
2012
Tongue
English
Weight
748 KB
Volume
7
Category
Article
ISSN
1931-7573

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TiNi films were prepared by co-sputtering TiNi and Ti targets. X-ray photoelectron spectroscopy (XPS) was employed to study surface chemistry of the films and interfacial structure of Si/TiNi system. Exposure of the TiNi film to the ambient atmosphere (23 β€’ C and 80% relatively humidity) facilitated