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Group III nitride core-shell nano- and microrods for optoelectronic applications

✍ Scribed by Mandl, Martin; Wang, Xue; Schimpke, Tilman; Kölper, Christopher; Binder, Michael; Ledig, Johannes; Waag, Andreas; Kong, Xiang; Trampert, Achim; Bertram, Frank; Christen, Jürgen; Barbagini, Francesca; Calleja, Enrique; Strassburg, Martin


Book ID
121288617
Publisher
John Wiley and Sons
Year
2013
Tongue
English
Weight
889 KB
Volume
7
Category
Article
ISSN
1862-6254

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Group III-nitride and SiC based micro- a
✍ Förster, Ch. ;Cimalla, V. ;Lebedev, V. ;Pezoldt, J. ;Brueckner, K. ;Stephan, R. 📂 Article 📅 2006 🏛 John Wiley and Sons 🌐 English ⚖ 180 KB

## Abstract Micro‐ and nanomechanical AlN and 3C‐SiC resonator beams with resonant frequencies between 20 kHz and 2 MHz, depending on the resonator geometry, have been realized and characterized at ambient conditions. Up to 200 nm thin epitaxial group III‐nitrides and SiC layers were grown on silic