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Grazing-incidence X-ray characterization of amorphous SiOxNyHz thin films

✍ Scribed by M. Brunel; L. Ortega; Y. Cros; S. Viscaino

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
289 KB
Volume
65-66
Category
Article
ISSN
0169-4332

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