✦ LIBER ✦

Global model of Ar, O2, Cl2, and Ar/O2 high-density plasma discharges

✍ Scribed by C. Lee

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Comparison of model and experiment for A

✍ Hsu, Cheng-Che; Nierode, Mark A; Coburn, John W; Graves, David B 📂 Article 📅 2006 🏛 Institute of Physics 🌐 English ⚖ 703 KB

High-Density Plasma Etching of Iridium T

✍ Chung, Chee Won; Kim, Hye In; Song, Young Soo 📂 Article 📅 2003 🏛 The Electrochemical Society 🌐 English ⚖ 176 KB

Rotational Spectra, Structure, and Dynam

✍ Arunan, E.; Emilsson, T.; Gutowsky, H. S. 📂 Article 📅 1994 🏛 American Chemical Society 🌐 English ⚖ 288 KB

Argon metastable densities in radio freq

✍ Rauf, Shahid; Kushner, Mark J. 📂 Article 📅 1997 🏛 American Institute of Physics 🌐 English ⚖ 444 KB

High-density plasma etching of indium–zi

✍ W.T. Lim; L. Stafford; Ju-Il Song; Jae-Soung Park; Y.W. Heo; Joon-Hyung Lee; Jeo 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 685 KB

Calculations of electron transport coeff

✍ Tuan, Do Anh 📂 Article 📅 2014 🏛 The Korean Physical Society 🌐 English ⚖ 450 KB