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Argon metastable densities in radio frequency Ar, Ar/O2 and Ar/CF4 electrical discharges

✍ Scribed by Rauf, Shahid; Kushner, Mark J.

Book ID: 115469347
Publisher: American Institute of Physics
Year: 1997
Tongue: English
Weight: 444 KB
Volume: 82
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.366111

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