✦ LIBER ✦
Quenching rate of argon metastable state atoms in high frequency Ar-C4F8 discharges
✍ Scribed by R. Claude; M. Moisan; A. Ricard; M.R. Wertheimer
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 404 KB
- Volume
- 166
- Category
- Article
- ISSN
- 0009-2614
No coin nor oath required. For personal study only.
✦ Synopsis
A method is described for measuring the quenching rate coefficient !f, of rare gas atoms in a given metastable state by a molecule acting within the discharge. This method provides "in situ" rates which take into account the quenching of metastables by both the molecule and its fragments. Such a method is applied to determine the quenching rate of Ar(-'P*) metastables by CIFI and by CF4 molecules,yieldingk, valuesof (9*2)x10-"'and (2&1.5)x10-" cm-3s-', respectively. In situ rates are essential for accurate modelling of plasma processes.