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Gettering centres in high-energy ion-implanted silicon investigated by point defect recombination

✍ Scribed by R. Kögler; A. Peeva; P. Werner; W. Skorupa; U. Gösele


Book ID
114164466
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
149 KB
Volume
175-177
Category
Article
ISSN
0168-583X

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