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Germanium-doped crystalline silicon: Effects of germanium doping on boron-related defects

✍ Scribed by Zhu, Xiaodong; Yu, Xuegong; Yang, Deren


Book ID
122245798
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
573 KB
Volume
401
Category
Article
ISSN
0022-0248

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## Abstract The behaviours of germanium doped in Czochralski (CZ) silicon have attracted considerable attention in recent years. In this article, a review concerning recent processes in the study about oxygen related defects in germanium‐doped CZ (GCZ) silicon is presented. The formation of oxygen