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The effect of germanium doping on the evolution of defects in silicon

✍ Scribed by C.A. Londos; A. Andrianakis; V.V. Emtsev; G.A. Oganesyan; H. Ohyama


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
417 KB
Volume
154-155
Category
Article
ISSN
0921-5107

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The impact of germanium doping on the di
✍ M.P. Bellmann; T. Kaden; D. Kressner-Kiel; J. Friedl; H.J. MΓΆller; L. Arnberg πŸ“‚ Article πŸ“… 2011 πŸ› Elsevier Science 🌐 English βš– 668 KB

In this paper experimental results on the effect of the Ge doping on the distribution of dislocations in directional solidified multi-crystalline (mc) Si are presented. The dislocation density distribution is analyzed on the basis of the average dislocation density and the cumulative probability by