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Generation and motion of dislocations in silicon wafers subjected to multi-step annealing

✍ Scribed by Mezhennyi, M V; Mil vidskii, M G; Reznik, V Ya; Falster, R J


Book ID
111644199
Publisher
Institute of Physics
Year
2002
Tongue
English
Weight
215 KB
Volume
14
Category
Article
ISSN
0953-8984

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