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Generation of dislocations in annealed silicon wafers under applied stress

✍ Scribed by M. V. Mezhennyi; M. G. Milvidskii; V. Ya. Reznik; R. J. Falster

Publisher: John Wiley and Sons
Year: 2005
Tongue: English
Weight: 207 KB
Volume: 2
Category: Article
ISSN: 1862-6351
DOI: 10.1002/pssc.200460538

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