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Gate-All-Around Nanowire MOSFET With Catalytic Metal Gate For Gas Sensing Applications

✍ Scribed by Gautam, Rajni; Saxena, Manoj; Gupta, R. S.; Gupta, Mridula


Book ID
121744228
Publisher
IEEE
Year
2013
Tongue
English
Weight
641 KB
Volume
12
Category
Article
ISSN
1536-125X

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In this work we present for the first time correlation of lateral uniaxial tensile strain and I-V characteristics of GAA Si NW n-MOSFET, all measured on the same device. Micro-Raman spectroscopy is employed for direct strain measurement on devices to exploit the main sources of process-induced strai