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GaN films deposited on glass substrate by middle-frequency magnetron sputtering

✍ Scribed by C.W. Zou; M.L. Yin; M. Li; C.S. Liu; L.P. Guo; D.J. Fu

Book ID
108290158
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
358 KB
Volume
517
Category
Article
ISSN
0040-6090

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## Abstract Influences of O~2~/Ar flux ratio (__R__) on surface morphology and structural evolution have been studied in the case of ZnO films deposited on glass substrates by radio‐frequency (rf) magnetron sputtering. Results of atomic force microscopy (AFM), X‐ray diffraction, and X‐ray photoelec