✦ LIBER ✦

Hafnium oxide thin films deposited by reactive middle-frequency dual-magnetron sputtering

✍ Scribed by V. Pervak; F. Krausz; A. Apolonski

Book ID: 108289704
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 786 KB
Volume: 515
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2007.03.180

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

GaN films deposited by middle-frequency

GaN films deposited by middle-frequency magnetron sputtering

✍ C.W. Zou; M.L. Yin; M. Li; L.P. Guo; D.J. Fu 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 530 KB

Aluminium nitride thin films deposited b

Aluminium nitride thin films deposited by DC reactive magnetron sputtering

✍ V. Dimitrova; D. Manova; T. Paskova; Tz. Uzunov; N. Ivanov; D. Dechev 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 375 KB

AlN-films prepared by dc reactive magnetron sputtering. AlN in an Ar+N 2 gas mixture have been prepared and their microstructure, hardness, refractive index and IR transmittance examined. At l = 640 nm the refractive index was 1.93 and k = 3×10 -3 ; high transmission occurred between [??] structure

Nano-crystalline Zr2ON2 thin films depos

Nano-crystalline Zr2ON2 thin films deposited by reactive magnetron sputtering

✍ A. Rizzo; M.A. Signore; L. Mirenghi; A. Cappello; L. Tapfer 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 393 KB

GaN films deposited on glass substrate b

GaN films deposited on glass substrate by middle-frequency magnetron sputtering

✍ C.W. Zou; M.L. Yin; M. Li; C.S. Liu; L.P. Guo; D.J. Fu 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 358 KB

Characterization of tin oxide thin films

Characterization of tin oxide thin films deposited by reactive sputtering

✍ F.C. Stedile; B.A.S. De Barros Jr.; C.V.Barros Leite; F.L. Freire Jr.; I.J.R. Ba 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 367 KB

Annealing Studies on Zinc Oxide Thin Fil

Annealing Studies on Zinc Oxide Thin Films Deposited by Magnetron Sputtering

✍ Tingfang Yen; Dave Strome; Sung Jin Kim; Alexander N. Cartwright; Wayne A. Ander 📂 Article 📅 2007 🏛 Springer US 🌐 English ⚖ 468 KB