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GaAs surface modification by room-temperature hydrogen plasma passivation

✍ Scribed by E. Yoon; R. A. Gottscho; V. M. Donnelly; H. S. Luftman

Book ID: 125888376
Publisher: American Institute of Physics
Year: 1992
Tongue: English
Weight: 560 KB
Volume: 60
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.106894

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