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Real-time monitoring of low-temperature hydrogen plasma passivation of GaAs

โœ Scribed by Gottscho, Richard A.; Preppernau, Bryan L.; Pearton, Stephen J.; Emerson, A. Bruce; Giapis, Konstantinos P.


Book ID
126063602
Publisher
American Institute of Physics
Year
1990
Tongue
English
Weight
883 KB
Volume
68
Category
Article
ISSN
0021-8979

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