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GaAs passivation by low-frequency plasma-enhanced chemical vapour deposition of silicon nitride

✍ Scribed by Jaouad, A.; Aimez, V.; Aktik, Ç.


Book ID
124095820
Publisher
The Institution of Electrical Engineers
Year
2004
Tongue
English
Weight
213 KB
Volume
40
Category
Article
ISSN
0013-5194

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