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FTIRS study of porous silicon at different oxidation stages

✍ Scribed by J. D. Moreno; R. Guerrero-Lemus; R. J. Martín-Palma; J. M. Martínez-Duart; M. L. Marcos; J. González-Velasco

Book ID
111536068
Publisher
Springer
Year
1999
Tongue
English
Weight
46 KB
Volume
34
Category
Article
ISSN
0022-2461

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Laser local oxidation of porous silicon:
Laser local oxidation of porous silicon: a FTIR spectroscopy investigation
✍ Rocchia, M. ;Rossi, A. M. ;Borini, S. ;Boarino, L. ;Amato, G. 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 193 KB

## Abstract The local oxidation of porous silicon (PS), induced by a focused laser beam, could represent an alternative method for patterning PS through direct writing. Important phase changes take place on PS when irradiated by a focused laser beam and moreover a complete confinement of the oxidiz