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Frequency optimization for capacitively coupled plasma source

✍ Scribed by Bera, K.; Hoffman, D.; Shannon, S.; Delgadino, G.; Yan Ye,

Book ID: 118202151
Publisher: IEEE
Year: 2005
Tongue: English
Weight: 266 KB
Volume: 33
Category: Article
ISSN: 0093-3813
DOI: 10.1109/tps.2005.845934

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