✦ LIBER ✦
A Time-Dependent Collisional Sheath Model for Dual-Frequency Capacitively Coupled RF Plasma
✍ Scribed by Rahman, M. T.; Dewan, M. N. A.; Ahmed, A.; Chowdhury, M. R. H.
- Book ID
- 118233537
- Publisher
- IEEE
- Year
- 2013
- Tongue
- English
- Weight
- 238 KB
- Volume
- 41
- Category
- Article
- ISSN
- 0093-3813
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