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FowlerâNordheim analysis of oxides on 4H-SiC substrates using noncontact metrology

✍ Scribed by Oborina, Elena I.; Benjamin, Helen N.; Hoff, Andrew M.

Book ID: 120592267
Publisher: American Institute of Physics
Year: 2009
Tongue: English
Weight: 561 KB
Volume: 106
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.3245323

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