Formation of zirconia—ceria layers on silicon wafers using laser ablation

✍ Scribed by A.G. Akimov; D.B. Bogomolov; A.E. Gorodetskii; L.P. Kazanskii; A.N. Khodan; I.L. Krylov; J.-P. Langeron; N.A. Melnikova; D. Michel; J.-L. Vignes; J. Perrière

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 655 KB
• Volume: 238
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(94)90641-6