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Formation of β-SiC layers on heated silicon wafers exposed to sublimed carbon

✍ Scribed by P. Durupt; J.P. Gauthier; J.A. Roger; J. Pivot

Publisher: Elsevier Science
Year: 1981
Tongue: English
Weight: 164 KB
Volume: 85
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(81)90631-3

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