✦ LIBER ✦

Formation of Submicrometer Pore Arrays by Electrochemical Etching of Silicon and Nanoimprint Lithography

✍ Scribed by Laffite, Guillaume; Roumanie, Marilyne; Gourgon, Cecile; Perret, Corinne; Boussey, Jumana; Kleimann, Pascal

Book ID: 118042817
Publisher: The Electrochemical Society
Year: 2011
Tongue: English
Weight: 586 KB
Volume: 158
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.3514584

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Fabrication of metal nanoring array by n

Fabrication of metal nanoring array by nanoimprint lithography (NIL) and reactive ion etching

✍ Bo Cui; Teodor Veres 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 440 KB

High-Density 3-D Capacitors for Power Sy

High-Density 3-D Capacitors for Power Systems On-Chip: Evaluation of a Technology Based on Silicon Submicrometer Pore Arrays Formed by Electrochemical Etching

✍ Brunet, Magali; Kleimann, Pascal 📂 Article 📅 2013 🏛 IEEE 🌐 English ⚖ 772 KB

Fabrication of precisely controlled sili

Fabrication of precisely controlled silicon wire and cone arrays by electrochemical etching

✍ Hong-Seok Seo; Xiaopeng Li; Han-Don Um; Bongyoung Yoo; Jae-Hyun Kim; Kang-Pil Ki 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 390 KB

Lithography-free fabrication of silicon

Lithography-free fabrication of silicon nanowire and nanohole arrays by metal-assisted chemical etching

✍ Ruiyuan Liu, Fute Zhang, Celal Con, Bo Cui, Baoquan Sun 📂 Article 📅 2013 🏛 Springer-Verlag 🌐 English ⚖ 605 KB

Formation of three-dimensional microstru

Formation of three-dimensional microstructures by electrochemical etching of silicon

✍ Kleimann, P.; Linnros, J.; Juhasz, R. 📂 Article 📅 2001 🏛 American Institute of Physics 🌐 English ⚖ 585 KB

Ordered silicon nanowire arrays via nano

Ordered silicon nanowire arrays via nanosphere lithography and metal-induced etching

✍ Peng, Kuiqing; Zhang, Mingliang; Lu, Aijiang; Wong, Ning-Bew; Zhang, Ruiqin; Lee 📂 Article 📅 2007 🏛 American Institute of Physics 🌐 English ⚖ 707 KB