✦ LIBER ✦
High-Density 3-D Capacitors for Power Systems On-Chip: Evaluation of a Technology Based on Silicon Submicrometer Pore Arrays Formed by Electrochemical Etching
✍ Scribed by Brunet, Magali; Kleimann, Pascal
- Book ID
- 121336655
- Publisher
- IEEE
- Year
- 2013
- Tongue
- English
- Weight
- 772 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0885-8993
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