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Formation of structure defects and behaviour of ion-implanted boron in silicon under annealing in various ambients

โœ Scribed by Komarov, F. F. ;Kuryazov, V. D. ;Solovev, V. S. ;Shiryaev, S. Yu.


Publisher
John Wiley and Sons
Year
1980
Tongue
English
Weight
479 KB
Volume
58
Category
Article
ISSN
0031-8965

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Effect of boron on formation of intersti
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## Abstract The presence of boron in silicon has been shown to have a deleterious effect on the luminescence of interstitialโ€related centres, particularly the Wโ€centre which is often observed after ion implantation and a low temperature anneal. Competition between siliconโ€interstitial and boronโ€int