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Formation of silicon nanoislands on crystalline silicon substrates by thermal annealing of silicon rich oxide deposited by low pressure chemical vapour deposition

✍ Scribed by Yu, Zhenrui; Aceves-Mijares, Mariano; Luna-López, A; Du, Jinhui; Bian, Dongcai

Book ID: 126305968
Publisher: Institute of Physics
Year: 2006
Tongue: English
Weight: 945 KB
Volume: 17
Category: Article
ISSN: 0957-4484
DOI: 10.1088/0957-4484/17/19/031

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