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Formation of pure thin films by means of self-sputtering deposition

✍ Scribed by Y. Horino; A. Chayahara; N. Tsubouchi; C. Heck; A. Kinomura; K. Abiko


Book ID
114086638
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
248 KB
Volume
343-344
Category
Article
ISSN
0040-6090

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