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Formation of polycrystalline SiC film by excimer-laser chemical vapour deposition

✍ Scribed by T. Noda; H. Suzuki; H. Araki; F. Abe; M. Okada

Publisher
Springer
Year
1992
Tongue
English
Weight
565 KB
Volume
11
Category
Article
ISSN
0261-8028

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