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Formation of niobium oxynitrides by rapid thermal processing (RTP)

✍ Scribed by V.A. Matylitskaya; W. Bock; K. Thoma; B.O. Kolbesen

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 288 KB
Volume: 252
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2005.01.119

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