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Formation of nanocrystals embedded in a silicon nitride film at a low temperature (⩽200 °C)

✍ Scribed by Kyoung-Min Lee; Tae-Hwan Kim; Wan-Shick Hong


Book ID
113897528
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
353 KB
Volume
59
Category
Article
ISSN
1359-6462

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