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Formation of Germanium Nanocrystals Embedded in a Silicon-Oxygen-Nitride Layer

✍ Scribed by Tu, Chun-Hao; Chang, Ting-Chang; Liu, Po-Tsun; Weng, Chi-Feng; Liu, Hsin-Chou; Chang, Li-Ting; Lee, Sheng-Kai; Chen, Wei-Ren; Sze, Simon M.; Chang, Chun-Yen

Book ID: 118261271
Publisher: The Electrochemical Society
Year: 2007
Tongue: English
Weight: 656 KB
Volume: 154
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.2717494

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